Police had earlier registered cases against Rampal, including that of sedition against him and several of his followers, including key aides.
The sprawling Ashram is spread over 12 acres of land, police said, adding they suspect that there may be arms and other ammunition inside, some of which was used to target the security personnel on Tuesday.
During the siege, four women died under mysterious circumstances while a young woman who was taken to hospital at Hisar in a serious condition also died. An infant was also declared dead by the hospital after being taken there yesterday.
Many of the followers who came out early today said there were still many who were inside.
After coming out, the police took them straight to railway station and bus stands in the vehicles arranged by the government.
Haryana Police and para-military forces kept surrounding the premises and were keeping a vigil so that any accused person who may be hiding inside does not escape.
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